The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 04, 2010
Filed:
Jan. 16, 2007
Evan Drake Harriaman Green, San Jose, CA (US);
Carl Iacono, Livermore, CA (US);
Jan-willem Pieterse, San Jose, CA (US);
Evan Drake Harriaman Green, San Jose, CA (US);
Carl Iacono, Livermore, CA (US);
Jan-Willem Pieterse, San Jose, CA (US);
Newport Corporation, Irvine, CA (US);
Abstract
A device assembly () for a precision apparatus () includes a device housing (), a device (), a device mover assembly (), and a measurement system (). The device mover assembly () moves the device () relative to the device housing () about a first axis and about a second axis that is orthogonal to the first axis. The measurement system () monitors movement of the device (). The measurement system () monitors movement of the device () and can include a first sensor assembly () that monitors movement about the first axis and a second sensor assembly () that monitors movement about a second axis. Each sensor assembly () () can include a sensor adjuster () () that adjusts the position of a portion of the respective sensor assembly () () to independently tune the sensor assemblies () () and independently enhance the performance of each sensor assembly () (). Further, each sensor assembly () () can be a magnetic type sensor.