The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 04, 2010
Filed:
Dec. 05, 2003
Applicants:
Werner Kröninger, Vilshofen/Albersdorf, DE;
Günter Lang, Nürnberg, DE;
Inventors:
Werner Kröninger, Vilshofen/Albersdorf, DE;
Günter Lang, Nürnberg, DE;
Assignee:
Infineon Technologies AG, Munich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 38/10 (2006.01); B32B 37/10 (2006.01); B32B 7/12 (2006.01);
U.S. Cl.
CPC ...
Abstract
Explained, inter alia, is a method in which a workpiece () to be processed is fastened to a work carrier () by means of a solid (). The work carrier () is made of a porous material, e.g. of porous ceramic. This processing method permits simple manipulation of the wafer during the processing. In addition, the workpiece () can be easily separated from the work carrier () using a solvent.