The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2010
Filed:
Sep. 06, 2002
Masaru Adachi, Fukuoka, JP;
Mitsunori Kawabe, Fukuoka, JP;
Masaru Shigesada, Okayama, JP;
Kabushiki Kaisha Yaskawa Denki, Fukuoka, JP;
Abstract
An object is to provide a method for teaching the position of a semiconductor wafer automatically and accurately without relying on the sight of an operator as well as a teaching jig that is used for the above method. To this end, in the invention, a teaching jigis detected by a first transmission-type sensorthat is provided at the tips of a wafer gripping portionof a robot. The teaching jigis composed of a large disc portionthat is the same in outer diameter as a semiconductor wafer and a small disc portionthat is concentric with the large disc portion. The teaching jigis detected by a second transmission-type sensorthat is provided on the wafer gripping portion. The second transmission-type sensoris mounted on a sensor jigso as to be detachable form the wafer gripping portion