The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2010
Filed:
Oct. 25, 2007
Hironobu Yabuta, Shizuoka, JP;
Takahiro Shirai, Shizuoka, JP;
Hironobu Yabuta, Shizuoka, JP;
Takahiro Shirai, Shizuoka, JP;
Ushio Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
An extreme ultraviolet radiation source device comprises a vessel; an electric discharge section including a pair of main discharge electrodes; a material supply unit which supplies an extreme ultraviolet radiating species to the electric discharge section; a high voltage generating section which impress high voltage to the pair of main discharge electrodes; a grazing incidence type collector unit which condenses extreme ultraviolet light emitted from high temperature plasma; a light extraction section formed in the vessel; a gas supply unit which supplies gas into the vessel from a light emitting side of the collector unit, an exhaust unit which discharges the gas from a light incidence side of the collector unit; wherein a flow path through which the gas supplied from the light emitting side of the collector unit passes is formed only inside the collector unit.