The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2010
Filed:
Aug. 18, 2008
Jeong-ho Lee, Seoul, KR;
Young-hoon Park, Suwon-si, KR;
Sang-il Jung, Seoul, KR;
Ui-sik Kim, Seongnam-si, KR;
Jun-seok Yang, Seongnam-si, KR;
Jeong-ho Lee, Seoul, KR;
Young-hoon Park, Suwon-si, KR;
Sang-il Jung, Seoul, KR;
Ui-sik Kim, Seongnam-si, KR;
Jun-seok Yang, Seongnam-si, KR;
Samsung Electronics Co., Ltd., Gyeonggi-do, KR;
Abstract
Example embodiments may provide fine patterns for semiconductor devices and methods of forming fine patterns for semiconductor devices. Example methods may include forming a spacer pattern on a substrate and/or an insulating layer pattern adjacent to sides of the spacer pattern and/or disposed at the same level as the spacer pattern, forming a pair of recesses exposing sides of the spacer pattern by removing a portion of the insulating layer pattern, and/or filling a conductive material in the recesses.