The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 27, 2010

Filed:

Aug. 12, 2008
Applicants:

Cyprian E. Uzoh, San Jose, CA (US);

Bulent M. Basol, Manhattan Beach, CA (US);

Hung-ming Wang, San Jose, CA (US);

Homayoun Talieh, San Jose, CA (US);

Inventors:

Cyprian E. Uzoh, San Jose, CA (US);

Bulent M. Basol, Manhattan Beach, CA (US);

Hung-Ming Wang, San Jose, CA (US);

Homayoun Talieh, San Jose, CA (US);

Assignee:

Novellus Systems, Inc., San Jose, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/44 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method is provided for manufacturing removable contact structures on the surface of a substrate to conduct electricity from a contact member to the surface during electroprocessing. The method comprises forming a conductive layer on the surface. A predetermined region of the conductive layer is selectively coated by a contact layer so that the contact member touches the contact layer as the electroprocessing is performed on the conductive layer.


Find Patent Forward Citations

Loading…