The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2010
Filed:
Jan. 18, 2008
Eric W Beach, Tucson, AZ (US);
Eric W Beach, Tucson, AZ (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
An integrated circuit structure including multiple thin film resistors having different sheet resistances and TCRs includes a first oxide layer () formed on a semiconductor substrate (), a first thin film resistor () disposed on the first oxide layer (), and a second oxide layer () disposed over the first oxide layer () and first thin film resistor (). A second thin film resistor () is formed on the second oxide layer () and a third oxide layer () is formed over the second thin film resistor () and the second oxide layer (). Interconnect metallization elements (A,B &A,B) disposed on at least one of the second () and third () oxide layers electrically contact the circuit element (), terminals of the first thin film resistor (), and terminals of the second thin film resistor (), respectively, through corresponding contact openings through at least one of the second () and third () oxide layers.