The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2010
Filed:
Apr. 11, 2006
Applicants:
Huikai Xie, Gainesville, FL (US);
Khai D. T. Ngo, Blacksburg, VA (US);
Inventors:
Huikai Xie, Gainesville, FL (US);
Khai D. T. Ngo, Blacksburg, VA (US);
Assignee:
University of Florida Research Foundation, Inc., Gainesville, FL (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/44 (2006.01);
U.S. Cl.
CPC ...
Abstract
Methods of fabricating micro-electromechanical system devices from complementary metal oxide semiconductors (CMOS) are provided.