The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2010
Filed:
Mar. 16, 2009
Applicants:
Oh-nam Kwon, Chungcheongnam-do, KR;
Kyoung-mook Lee, Seoul, KR;
Heung-lyul Cho, Seoul, KR;
Seung-hee Nam, Dae-gu, KR;
Cyoo-chul JO, Gyeonggi-do, KR;
Inventors:
Oh-Nam Kwon, Chungcheongnam-do, KR;
Kyoung-Mook Lee, Seoul, KR;
Heung-Lyul Cho, Seoul, KR;
Seung-Hee Nam, Dae-gu, KR;
Cyoo-Chul Jo, Gyeonggi-do, KR;
Assignee:
LG Display Co., Ltd., Seoul, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/84 (2006.01);
U.S. Cl.
CPC ...
Abstract
A manufacturing method of an electro line for a liquid crystal display device includes depositing a barrier layer made of a conducting material on a substrate, depositing a copper layer (Cu) on the barrier layer, wet-etching the Cu layer using a first etchant, and dry-etching the barrier layer using a second etchant using the wet-etched Cu layer as an etch mask.