The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2010
Filed:
Jun. 20, 2006
Applicants:
Lance D. Delzeit, Sunnyvale, CA (US);
John F. Schipper, Palo Alto, CA (US);
Inventors:
Lance D. Delzeit, Sunnyvale, CA (US);
John F. Schipper, Palo Alto, CA (US);
Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/52 (2006.01); C23C 16/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Method and system for combined coarse scale control and fine scale control of growth density of a carbon nanotube ('CNT') array on a substrate, using a selected electrical field adjacent to a substrate surface for coarse scale density control (by one or more orders of magnitude) and a selected CNT growth temperature range for fine scale density control (by multiplicative factors of less than an order of magnitude) of CNT growth density. Two spaced apart regions on a substrate may have different CNT growth densities and/or may use different feed gases for CNT growth.