The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2010
Filed:
Mar. 29, 2004
Applicant:
Ichiro Mitsuyoshi, Kyoto, JP;
Inventor:
Ichiro Mitsuyoshi, Kyoto, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
Abstract
When FOUPs (front opening unified pods) () are mounted on shelves (), respectively, shelves () are moved in the vertical direction by cylinders (), respectively. The FOUP () is thereby moved above the FOUP () to create a space (), for ensuring a transport path (AR) for the FOUP (). The FOUPcan therefore be transported to a shelf () without moving the FOUP () to another shelf, achieving improved throughput of substrate processing.
Mitsuyoshi, Ichiro. (2010). Substrate processing apparatus (U.S. Patent No. 7704031). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7704031
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile