The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2010
Filed:
Jun. 13, 2005
Applicants:
Masashi Sekine, Tokyo, JP;
Hidefumi Harada, Tokyo, JP;
Inventors:
Masashi Sekine, Tokyo, JP;
Hidefumi Harada, Tokyo, JP;
Assignee:
Yamatake Corporation, , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 9/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
There is provided a pressure sensor having: a sensor chip () which detects a pressure; a base plate (()) which supports the sensor chip (); and a support diaphragm () which is bonded to the base plate (()) and supports the base plate (()), wherein the pressure sensor () has a structure in which the support diaphragm () is joined to a package (), and the sensor chip () and the base plate (()) are supported in the package through the support diaphragm () alone, thereby constantly and accurately detecting a pressure without being affected by a heat stress caused due to heat from the outside.