The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 2010
Filed:
Sep. 08, 2004
Yukihiro Ushiku, Yokohama, JP;
Akira Ogawa, Yokohama, JP;
Hidenori Kakinuma, Kawasaki, JP;
Shunji Shuto, Oita, JP;
Masahiro Abe, Yokohama, JP;
Tatsuo Akiyama, Tokyo, JP;
Shigeru Komatsu, Kamakura, JP;
Yukihiro Ushiku, Yokohama, JP;
Akira Ogawa, Yokohama, JP;
Hidenori Kakinuma, Kawasaki, JP;
Shunji Shuto, Oita, JP;
Masahiro Abe, Yokohama, JP;
Tatsuo Akiyama, Tokyo, JP;
Shigeru Komatsu, Kamakura, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
The present invention provides a solution for interleaving data frames, in a semiconductor device manufacturing system in which the processing apparatus for conducting a process on any one of a semiconductor substrate and a thin film on a surface thereof; a self-diagnostic system for diagnosing a state of the processing apparatus; and a parameter fitting apparatus for maintaining a parameter of the self-diagnostic system when an inspection result of the semiconductor substrate having undergone the process has been determined to be correct, and for changing the parameter of the self-diagnostic system when the inspection result has been determined to be incorrect.