Motion compensation for radar imaging

Abstract

In one embodiment, a radar is provided that is configured to construct an image of a target within or adjacent to a substrate according to scan points associated with a surface of the substrate while the radar is scanned in a first direction. The radar includes a transceiver that transmits radar pulses and receives reflected radar pulses using an antenna directed at the surface; and an image processor configured to use a plurality of processed received radar pulses to generate an image portion according to each scan point; and at least one laser range finder being configured to illuminate a first surface portion within a surface portion illuminated by the antenna and to illuminate a second surface portion displaced in the first direction from the first surface portion, the laser range finder determining a first range between the laser range finder and the first surface portion and determining a second range between the laser range finder and the second surface portion, wherein the radar is configured to process the first and second ranges to determine a range translation of the radar during the scan in the first direction, and wherein the image processor is further configured to compensate the image portions according to the determined range translation so at construct an image of the target.