The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 2010
Filed:
Aug. 03, 2006
Wan-don Kim, Yongin-si, KR;
Jae-hyun Joo, Yongin-si, KR;
Seok-jun Won, Seoul, KR;
Jung-hee Chung, Suwon-si, KR;
Jin-yong Kim, Seoul, KR;
Suk-jin Chung, Suwon-si, KR;
Wan-don Kim, Yongin-si, KR;
Jae-hyun Joo, Yongin-si, KR;
Seok-jun Won, Seoul, KR;
Jung-hee Chung, Suwon-si, KR;
Jin-yong Kim, Seoul, KR;
Suk-jin Chung, Suwon-si, KR;
Abstract
A method of fabricating a uniformly wrinkled capacitor lower electrode without the need to perform a high-temperature heat treatment and a method of fabricating a capacitor including the uniformly wrinkled capacitor lower electrode are provided. A first conductive layer is formed. Then, a second conductive layer including about 20% to about 50% of impurities is formed on the first conductive layer. Next, at least some of the impurities are exhausted from the second conductive layer by heat treating the second conductive layer. A surface of the second conductive layer is wrinkled due to the exhaustion of the impurities from the second conductive layer. A dielectric layer and an upper capacitor electrode may then be formed.