The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 2010
Filed:
May. 05, 2009
John L. Fitz, Windsor Mill, MD (US);
Daniel S. Hinkel, Sykesville, MD (US);
Scott C. Horst, Sykesville, MD (US);
John L. Fitz, Windsor Mill, MD (US);
Daniel S. Hinkel, Sykesville, MD (US);
Scott C. Horst, Sykesville, MD (US);
The United States of America as Represented by the Director, National Security Agency, Washington, DC (US);
Abstract
The present invention is a method of fabricating an optical device using multiple sacrificial spacer layers. The first step in this process is to fabricate the underlying base structure and deposit an optical structure thereon. A facet is then created at the ends of the optical structure and alternating sacrificial and intermediate layers are fabricated on the device. A mask layer is deposited on the structure, with openings created in the layers to allow use of an etchant. User-defined portions of the spacer layers are subsequently removed with the etchant to create air gaps between the intermediate layers.