The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 13, 2010
Filed:
Oct. 26, 2005
Daniel Ian Mansfield, Leicester, GB;
Andrew Douglas Bankhead, Leicester, GB;
Daniel Ian Mansfield, Leicester, GB;
Andrew Douglas Bankhead, Leicester, GB;
Taylor Hobson Limited, Leicester, GB;
Abstract
An interferometer system () directs light along a sample path (SP) towards a sample surface () and along a reference path (RP) towards a reference surface (). Light reflected by a sample surface region and by the reference surface interfere. Sensing elements (SE) sense interference fringes at intervals along a scan path to provide a set of intensity data. A coherence peak position determiner () determines from the intensity data set a position on the scan path that corresponds to the height of the surface region. An amplitude determiner () determines amplitude data representing the amplitude of the intensity data at the determined height position. A modified surface height calculator () calculates modified height data by modifying the height data by a correction factor determined using the corresponding amplitude data and a correction parameter provided by a correction parameter provider ().