The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 13, 2010
Filed:
May. 23, 2006
Jun Gao, Palo Alto, CA (US);
Carl E. Picciotto, Palo Alto, CA (US);
Ross R. Allen, Palo Alto, CA (US);
Jun Gao, Palo Alto, CA (US);
Carl E. Picciotto, Palo Alto, CA (US);
Ross R. Allen, Palo Alto, CA (US);
Hewlett-Packard Development Company, L.P., Houston, TX (US);
Abstract
A system including a data acquisition system and a processing system is provided. The data acquisition system is configured to capture a first reference frame that includes a first feature in a first imaging area on a substrate prior to a relative position between the data acquisition system and the substrate being adjusted by approximately a predetermined distance during a first time period, capture a first comparison frame that includes the first feature in a second imaging area on the substrate and a second reference frame that includes a second feature in the first imaging area on the substrate subsequent to the first time period, and capture a second comparison frame that includes the second feature in the second imaging area on the substrate subsequent to the relative position being adjusted by approximately the predetermined distance during a second time period that is subsequent to the first time period. The second imaging area is separated from the first imaging area by the predetermined distance. The processing system is configured to determine a displacement sum using a first displacement between the first feature in the first reference frame and the first feature in the first comparison frame and a second displacement between the second feature in the second reference frame and the second feature in the second comparison frame.