The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 13, 2010
Filed:
Jun. 26, 2008
Tsuyoshi Takemoto, Amagasaki, JP;
Hiroshi Nishida, Amagasaki, JP;
Osamu Torayashiki, Amagasaki, JP;
Takashi Ikeda, Amagasaki, JP;
Ryuta Araki, Amagasaki, JP;
Tsuyoshi Takemoto, Amagasaki, JP;
Hiroshi Nishida, Amagasaki, JP;
Osamu Torayashiki, Amagasaki, JP;
Takashi Ikeda, Amagasaki, JP;
Ryuta Araki, Amagasaki, JP;
Abstract
A MEMS device including a getter film formed inside a hermetic chamber provides stable performance of the MEMS device by electrically stabilizing the getter film. The MEMS device includes a movable portion and a fixed portion formed inside the hermetic chamber. The hermetic chamber is formed by a base material of the MEMS device and glass substrates and having a cavity and cavities made therein. A part of any continuous getter film formed inside the hermetic chamber connects to only one of any one or a plurality of predetermined electrical potentials of the fixed portion and a ground potential of the fixed portion through the base material of the MEMS device.