The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 13, 2010
Filed:
May. 10, 2005
Shigemi Ohtsu, Ashigarakami-gun, JP;
Tatsuya Maruyama, Ashigarakami-gun, JP;
Eiichi Akutsu, Ashigarakami-gun, JP;
Kazuhito Hashimoto, Yokohama, JP;
Shigemi Ohtsu, Ashigarakami-gun, JP;
Tatsuya Maruyama, Ashigarakami-gun, JP;
Eiichi Akutsu, Ashigarakami-gun, JP;
Kazuhito Hashimoto, Yokohama, JP;
Fuji Xerox Co., Ltd., Tokyo, JP;
Toudai TLO, Ltd., Tokyo, JP;
Abstract
The present invention provides a titanium oxide photocatalytic thin film having a surface layer containing silicon oxide and titanium oxide and a production method for producing a titanium oxide photocatalytic thin film having a surface layer containing silicon oxide and titanium oxide and comprising a step of radiating excimer beam to the titanium oxide thin film while heating substrate on which the titanium oxide thin film is disposed in vacuum or gas atmosphere in the presence of a silicon-including compound.