The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 13, 2010
Filed:
Aug. 31, 2006
Jae-chang Lee, Hwaseong-si, KR;
Jae-woo Chung, Yongin-si, KR;
Kyo-yool Lee, Yongin-si, KR;
Chang-seung Lee, Yongin-si, KR;
Sung-gyu Kang, Suwon-si, KR;
Jae-chang Lee, Hwaseong-si, KR;
Jae-woo Chung, Yongin-si, KR;
Kyo-yool Lee, Yongin-si, KR;
Chang-seung Lee, Yongin-si, KR;
Sung-gyu Kang, Suwon-si, KR;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Abstract
A piezoelectric inkjet printhead including an upper substrate formed of a single crystal silicon substrate or an SOI substrate and having an ink inlet therethrough, and a lower substrate formed of an SOI substrate having a sequentially stacked structure with a first silicon layer, an intervening oxide layer, and a second silicon layer in which a manifold, pressure chambers, and dampers are formed in the second silicon layer by wet or dry etching, and nozzles are formed through the intervening oxide layer and the first silicon layer by dry etching, and a method of manufacturing the same.