The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2010
Filed:
Apr. 02, 2007
Kenta Mikuriya, Tokyo, JP;
Takayuki Kei, Tokyo, JP;
Yasunori Yokoyama, Tokyo, JP;
Naomichi Chida, Tokyo, JP;
Yoshiaki Naganuma, Kanagawa, JP;
Kenta Mikuriya, Tokyo, JP;
Takayuki Kei, Tokyo, JP;
Yasunori Yokoyama, Tokyo, JP;
Naomichi Chida, Tokyo, JP;
Yoshiaki Naganuma, Kanagawa, JP;
Yokogawa Electric Corporation, Tokyo, JP;
Abstract
A focus error detecting optical system has an optical parameter which makes a focus lock-in range by a focus error signal be a value capable of detecting focus on a front surface of a cover glass and focus on a back surface thereof separately. A control section, based on the focus error signal obtained by the focus error detecting optical system, brings a focal point of an observational optical system to a focus position. Further, focus error detecting optical systems include optical units each having an optical parameter corresponding to a numerical aperture of respective objective lenses. A control section selects the optical unit of the focus error detecting optical system corresponding to the objective lens in use. The control section, using a focus error signal obtained by the selected focus error detecting optical system, brings a focal point of an observational optical system to a focus position.