The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 06, 2010

Filed:

Jan. 30, 2009
Applicants:

Alexandros P. Papavasiliou, Oakland, CA (US);

Scot S. Olivier, Santa Cruz, CA (US);

Inventors:

Alexandros P. Papavasiliou, Oakland, CA (US);

Scot S. Olivier, Santa Cruz, CA (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); G02B 7/182 (2006.01); H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A deformable mirror formed out of two layers of a nanolaminate foil attached to a stiff substrate is introduced. Deformation is provided by an electrostatic force between two of the layers. The internal stiffness of the structure allows for high-spatial-frequency shapes. The nanolaminate foil of the present invention allows for a high-quality mirror surface. The device achieves high precision in the vertical direction by using foils with accurately controlled thicknesses, but does not require high precision in the lateral dimensions, allowing such mirrors to be fabricated using crude lithography techniques. Such techniques allow structures up to about the meter scale to be fabricated.


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