The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2010
Filed:
Aug. 04, 2005
Liquid immersion exposure apparatus, method of controlling the same, and device manufacturing method
Applicant:
Satoshi Akimoto, Utsunomiya, JP;
Inventor:
Satoshi Akimoto, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 27/52 (2006.01);
U.S. Cl.
CPC ...
Abstract
A liquid immersion exposure apparatus including a stage which carries a substrate, a projection lens unit which projects a pattern onto the substrate, a unit which supplies liquid to a space between the substrate and the projection lens unit and recovers the liquid from the space, and a controller which controls driving of the stage. The controller changes a driving profile of the stage according to a liquid immersion condition.