The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2010
Filed:
Oct. 06, 2005
Mizuhisa Nihei, Kawasaki, JP;
Mizuhisa Nihei, Kawasaki, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
The present invention is an object to provide a high-performance vertical field effect transistor having a microminiaturized structure in which the distance between the gate and the channel is made short not through a microfabrication process, having a large gate capacitance, and so elaborated that the gate can control the channel current with a low voltage, and a method for simply and efficiently manufacturing such a field effect transistor not through a complex process such as a microfabrication process. The field effect transistor of the present invention comprises a first electrode, a second electrode so arranged as to be electrically insulated from the first electrode, a semiconductive rod-shaped body extending entirely through at least one of the first and second electrodes, provided along the inner wall of a hole in which the first and second electrodes are exposed, and interconnecting the first and second electrodes, and a third electrode at least partially inserted in the hole and opposed to the semiconductive rod-shaped body with an insulating layer interposed between the third electrode and the semiconductive rod-shaped body. The aspect preferably include an aspect in which the thickness of the insulating layer is 50 nm or less and an aspect in which the semiconductive rod-shaped body is a single-wall carbon nanotube.