The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2010
Filed:
Oct. 17, 2007
Applicant:
Hye-sung Lee, Seoul, KR;
Inventor:
Hye-Sung Lee, Seoul, KR;
Assignee:
Dongbu HiTek Co., Ltd, Seoul, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/94 (2006.01); H01L 21/336 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of fabricating a flash memory includes forming a first oxide film over a semiconductor substrate, forming a metal film over the first oxide film, forming a photoresist pattern on the metal film, etching the metal film using the photoresist pattern as a mask and forming a metal film pattern, forming a second oxide film overlying the metal film pattern, and heat-treating the first and second oxide films at high temperature and processing the metal film pattern using metal oxide crystallization.