The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2010
Filed:
Dec. 29, 2004
Applicant:
Nobuo Aoi, Hyogo, JP;
Inventor:
Nobuo Aoi, Hyogo, JP;
Assignee:
Panasonic Corporation, Osaka, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H05H 4/24 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for forming an organic/inorganic hybrid insulation film includes the following steps. An organic silicon compound containing siloxane bonds is vaporized, the vaporized organic silicon compound is transported to a reaction chamber maintaining the compound in a monomer state, and then, the organic/inorganic hybrid insulation film having a main chain structure where siloxane parts and organic molecule parts are alternately combined on a substrate installed in the reaction chamber is formed by plasma-polymerizing the vaporized organic silicon compound in the reaction chamber.