The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2010
Filed:
Feb. 14, 2008
Applicants:
Katsunori Suzuki, Mihama-ku, JP;
Kenji Nakamura, Mihama-ku, JP;
Inventors:
Katsunori Suzuki, Mihama-ku, JP;
Kenji Nakamura, Mihama-ku, JP;
Assignee:
Kawasaki Microelectronics, Inc., Chiba, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01); B24B 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The main surface of a quartz component is divided by an offset into a first region having a larger height around an inner perimeter and a second region adjacent to the outer perimeter of the first region. Repeated restoration of a damaged component by forming a bulge on the first region and machining the bulge to make a flat surface while maintaining the offset enables long term use of the component.
Quick Actions:
Suzuki, Katsunori. (2010). Quartz component for plasma processing apparatus and restoring method thereof (U.S. Patent No. 7691277). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7691277
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile