The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2010
Filed:
Jul. 26, 2007
Jorg Pilchowski, Mercer Island, WA (US);
Uwe Pilchowski, Legal Representative, Weyhe, DE;
Michael J. Foster, Issaquah, WA (US);
Shifang Zhou, Redmond, WA (US);
Jorg Pilchowski, Mercer Island, WA (US);
Uwe Pilchowski, legal representative, Weyhe, DE;
Michael J. Foster, Issaquah, WA (US);
Shifang Zhou, Redmond, WA (US);
Honeywell International Inc., Morristown, NJ (US);
Abstract
A microelectromechanical system (MEMS) includes a housing defining an enclosed cavity, stator tines extending from the housing into the cavity, a MEMS device located within the cavity, the MEMS device including a proof mass and rotor tines extending from the proof mass, each rotor tine being positioned at a capacitive distance from a corresponding stator tine. The rotor tines include a first section extending a first distance from an insulating layer of the rotor tines and a second section extending a second distance from the insulating layer in an opposite direction from the first section. The stator tines include a first section extending a first distance from an insulating layer of the stator tines and a second section extending a second distance from the insulating layer in an opposite direction from the first section, the stator tine first distance being greater than the rotor tine first distance.