The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 30, 2010
Filed:
Sep. 19, 2005
Dirk Kenneth DE Vries, St-Georges-d'Orques, FR;
Albert Van DE Goor, Wijchen, NL;
Dirk Kenneth De Vries, St-Georges-d'Orques, FR;
Albert Van De Goor, Wijchen, NL;
NXP B.V., Eindhoven, NL;
Abstract
A method of obtaining parametric test data for use in monitoring alignment between layers of a semiconductor device. The method employs a test structure comprising a meander () of the material of a first layer of the semiconductor device, deposited relative to a conductive line (). A number of sets () of components, such as contacts or vias, are provided relative to the meander (), at successively smaller distances therefrom. A single analogue measurement can be performed between a first and (A) of the meander () and the conductive line () so as to determine the resistance therebetween, and the critical distance at (or on acceptable margin in relation thereto) between the first layer and a component of the semiconductor device can be obtained.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile