The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 30, 2010
Filed:
Dec. 02, 2003
Applicants:
Stuart M. Lindsay, Phoenix, AZ (US);
Tianwei Jing, Tempe, AZ (US);
Inventors:
Stuart M. Lindsay, Phoenix, AZ (US);
Tianwei Jing, Tempe, AZ (US);
Assignee:
Agilent Technologies, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 26/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A fast translation stage for a scanning probe microscope is provided. The stage includes at least one axis of translation driven at the natural resonant frequency of the translation stage such that distortion associated with rapid changes in scan direction is avoided. In one embodiment, the stage includes a sample plate or support that is driven, preferably by one or more piezoelectric actuator elements, so that the plate translates along the fast scan frequency at its resonant frequency.