The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 30, 2010
Filed:
Jan. 10, 2006
Hiroshi Naito, Aira-gun, JP;
Hideki Sato, Hamamatsu, JP;
Hiroaki Fukami, Aira-gun, JP;
Syuusei Takami, Aira-gun, JP;
Hiroshi Naito, Aira-gun, JP;
Hideki Sato, Hamamatsu, JP;
Hiroaki Fukami, Aira-gun, JP;
Syuusei Takami, Aira-gun, JP;
Yamaha Corporation, Shizuoka-ken, JP;
Abstract
A small-size magnetic sensor comprises three axial sensors each configured using plural giant magnetoresistive elements, wherein an X-axis sensor and a Y-axis sensor are arranged on the planar surface of an embedded layer of a substrate, and giant magnetoresistive elements forming a Z-axis sensor are formed on slopes of projections, which are formed by etching the embedded layer. It is possible to form an elongated projection on a substrate by way of the high-density plasma CVD method or by way of plasma etching and microwave etching, so that giant magnetoresistive elements are formed on the slopes of the elongated projection.