The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 30, 2010
Filed:
Dec. 31, 2008
Jacques Schmitt, Ville du Bois, FR;
Laurent Sansonnens, Concise, CH;
Mustapha Elyaakoubi, Ris-orangis, FR;
Michael Irzyk, Champlan, FR;
Jacques Schmitt, Ville du Bois, FR;
Laurent Sansonnens, Concise, CH;
Mustapha Elyaakoubi, Ris-orangis, FR;
Michael Irzyk, Champlan, FR;
Oerlikon Trading AG, Truebbach, Truebbach, CH;
Abstract
A vacuum vessel and at least two electrodes define an internal process space. At least one power supply is connectable with the electrodes. A substrate holder holds a substrate to be treated in the internal process space. At least one of the electrodes has along a first cross section a concave profile and has along a second cross section a convex profile, the first cross section being parallel to the second cross section. Gas is provided to the space through a gas inlet. Power is provided to the electrodes and the substrate is treated.