The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 30, 2010
Filed:
Mar. 03, 2006
Baomin Xu, Cupertino, CA (US);
David Kirtland Fork, Los Altos, CA (US);
Michael Yu Tak Young, Cupertino, CA (US);
Eugene Michael Chow, Mountain View, CA (US);
Baomin Xu, Cupertino, CA (US);
David Kirtland Fork, Los Altos, CA (US);
Michael Yu Tak Young, Cupertino, CA (US);
Eugene Michael Chow, Mountain View, CA (US);
Palo Alto Research Center Incorporated, Palo Alto, CA (US);
Abstract
Disclosed is a MEMS device which comprises at least one shape memory material such as a shape memory alloy (SMA) layer and at least one stressed material layer. Examples of such MEMS devices include an actuator, a micropump, a microvalve, or a non-destructive fuse-type connection probe. The device exhibits a variety of improved properties, for example, large deformation ability and high energy density. Also provided is a method of easily fabricating the MEMS device in the form of a cantilever-type or diaphragm-type structure.