The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 30, 2010
Filed:
Mar. 29, 2004
Yoshio Ishii, Saitama-Ken, JP;
Koji Tanemura, Saitama-Ken, JP;
Toshihiko Matsumoto, Saitama-Ken, JP;
Kozo Shirato, Saitama-Ken, JP;
Yoshio Ishii, Saitama-Ken, JP;
Koji Tanemura, Saitama-Ken, JP;
Toshihiko Matsumoto, Saitama-Ken, JP;
Kozo Shirato, Saitama-Ken, JP;
ERC, Inc., Saitama, JP;
Abstract
A vacuum control system allows the degree of vacuum in a vacuum vessel to be kept constant while removing vaporized components degassed into the vacuum vessel through a gas permeation diaphragm by stably introducing a very small amount of air into a vacuum exhaust path of the vacuum vessel. The vacuum control system controls the rotary power of a DC brushless motor, continuously controls displacement of a vacuum pump, and thus keeps the degree of vacuum in a vacuum vessel constant, by decompressing the inside of the vacuum vessel using an exhaust vacuum pump which operates with the DC brushless motor, monitoring the inside pressure of the vacuum vessel using a pressure sensor, and controlling a voltage applied to the DC brushless motor on the basis of an output signal resulting from measurement of the inside pressure of the vacuum vessel by the pressure sensor.