The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 30, 2010
Filed:
Dec. 04, 2006
Hitoshi Ohmori, Saitama, JP;
Yutaka Watanabe, Saitama, JP;
Shinya Morita, Saitama, JP;
Yoshihiro Uehara, Saitama, JP;
Weimin Lin, Saitama, JP;
Kazutoshi Katahira, Saitama, JP;
Hitoshi Ohmori, Saitama, JP;
Yutaka Watanabe, Saitama, JP;
Shinya Morita, Saitama, JP;
Yoshihiro Uehara, Saitama, JP;
Weimin Lin, Saitama, JP;
Kazutoshi Katahira, Saitama, JP;
Riken, Saitama, JP;
Abstract
There is disclosed a micro surface shape measurement probe including a probe shafthaving at a distant end thereof a probe memberfor contacting an objectto be measured, a probe bodyprovided with support means for movably supporting the probe shaftin a non-contact manner, a pressing device for pressing and moving the probe shafttoward the objectto be measured, a piezoelectric sensorincorporated in the probe bodyso that a reactive force acts to a pressing force applied to the probe shaft by the pressing device, a load detecting deviceto measure a load acting on the piezoelectric sensor, a control devicefor adjusting the pressing force applied by the pressing device based on the load detected by the load detecting device, and a displacement amount measuring device for measuring a position of the probe memberin contact with the objectto be measured by the pressing force adjusted by the control device