The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 2010
Filed:
Nov. 12, 2004
Michael R. Rice, Pleasanton, CA (US);
Eric A. Englhardt, Palo Alto, CA (US);
Robert B. Lowrance, Los Gatos, CA (US);
Martin R. Elliott, Round Rock, TX (US);
Jeffrey C. Hudgens, San Francisco, CA (US);
Michael R. Rice, Pleasanton, CA (US);
Eric A. Englhardt, Palo Alto, CA (US);
Robert B. Lowrance, Los Gatos, CA (US);
Martin R. Elliott, Round Rock, TX (US);
Jeffrey C. Hudgens, San Francisco, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
In a first aspect, a wafer loading station adapted to exchange wafer carriers with a wafer carrier transport system comprises a biasing element adapted to urge the end effector of the wafer loading station away from a moveable conveyor of the wafer carrier transport system upon the occurrence of a unscheduled event such as a power failure or an emergency shutdown. In a second aspect, an uninterruptible power supply commands a controller to cause the wafer carrier handler to retract the end effector from the wafer carrier transport system upon the occurrence of the unscheduled event, and provides the power necessary for the same. Numerous other aspects are provided.