The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 2010
Filed:
Jan. 20, 2006
Yoshito Nakanishi, Tokyo, JP;
Yoshito Nakanishi, Tokyo, JP;
Panasonic Corporation, Osaka, JP;
Abstract
The present invention provides an electromechanical switch enabled to achieve a high-speed switching response at a low driving voltage. An electromechanical switch body, which is an MEMS switch, has a first movable electrodeand a second movable electrode, both ends of each of which are respectively fixed to and laid on a first anchorand a second anchorformed on a silicon substrate, and also has a fixed electrodethat faces these movable electrodes. A first electromechanical switchenabled to be driven at a low voltage is constituted by the first movable electrode, which has a relatively weak spring force, and the fixed electrode. A second electromechanical switchenabled to be latched at a low voltage is constituted by the second movable electrode, which has a relatively strong spring force, and the fixed electrode. Consequently, the first movable electrodeis displaced at high speed at a low driving voltage, so that the first electromechanical switch is turned on at high speed. A restoring force causes the second movable electrodeto perform natural vibrations at high speed, so that the second electromechanical switch is turned off at high speed. The restored second movable electrodeis latched at a low driving voltage, so that the second electromechanical switch is turned on.