The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 23, 2010

Filed:

Jul. 08, 2004
Applicants:

Jakob Blattner, Ermatingen, CH;

Rudy Federici, Berg, CH;

Inventors:

Jakob Blattner, Ermatingen, CH;

Rudy Federici, Berg, CH;

Assignee:

Tec-Sem AG, Tägerwilen, CH;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23F 1/00 (2006.01); H01L 21/306 (2006.01); B65G 57/00 (2006.01); B65H 29/00 (2006.01); B65H 31/00 (2006.01); B65H 3/00 (2006.01); B65G 59/02 (2006.01); B65G 59/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

To make possible a tightly packed, essentially horizontal storage of wafers (), in which a simplified access to each of these wafers () is possible, a device is provided having a plurality of superimposed storage elements (). The storage elements () have device features () for depositing the wafers (). The storage elements () have projections () for lifting, whereby a specific storage element () as well as all storage elements () arranged above this specific storage element () can be lifted by a predetermined first height for producing a contact gap. The projections () can also be used to lift the storage element () arranged below the said storage element () by a predetermined second height for producing a freedom of access.


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