The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 2010
Filed:
Feb. 18, 2008
Kei Masunishi, Kawasaki, JP;
Akihiro Koga, Tokyo, JP;
Ryo Furukawa, Kawasaki, JP;
Tetsuya Kugimiya, Kawasaki, JP;
Akio Kobayashi, Sano, JP;
Hiroyuki Kawashima, Warabi, JP;
Kei Masunishi, Kawasaki, JP;
Akihiro Koga, Tokyo, JP;
Ryo Furukawa, Kawasaki, JP;
Tetsuya Kugimiya, Kawasaki, JP;
Akio Kobayashi, Sano, JP;
Hiroyuki Kawashima, Warabi, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Kabushiki Kaisha Topcon, Tokyo, JP;
Abstract
It is made possible to provide a deformable mirror apparatus which is deformable to a complicated shape (high-order shape). A deformable mirror apparatus includes: a substrate; a plurality of electrodes provided on the substrate; a spacer fixed above the substrate, having a first opening passing through from a first face of the spacer facing to the substrate to a second face of the spacer facing opposite from the first face, surrounding the electrodes, and having a step on the second face; a drive part including a membrane part disposed so as to cover the step of the spacer and so as to be opposed to the electrodes, a casing part having an opening at a bottom face of which the membrane part is exposed and supporting the membrane part, and a reflection film provided on the membrane part; and a voltage generator configured to generate predetermined voltage patterns on the electrodes, respectively.