The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 2010
Filed:
May. 26, 2006
Mitsuo Konno, Tsukuba, JP;
Tsuyoshi Ikehara, Tsukuba, JP;
Ryutaro Maeda, Tsukuba, JP;
Takashi Mihara, Hachioji, JP;
Mitsuo Konno, Tsukuba, JP;
Tsuyoshi Ikehara, Tsukuba, JP;
Ryutaro Maeda, Tsukuba, JP;
Takashi Mihara, Hachioji, JP;
National Institute of Advanced Industrial Science and Technology, Tokyo, JP;
Olympus Corporation, Tokyo, JP;
Abstract
By using a disc type resonator, a sensor detects a substance having a mass and the mass with high sensitivity. Moreover, it is preferable to detect a change in vibrations of a substance attached or adsorbed to an area having a vibration amplitude equal to or larger than a constant value. This disc type resonator can be fabricated by the MEMS technique by using single-crystal or polycrystalline Si as a structural material. To improve the attachment efficiency of molecules and the like to be detected, irregularity or a groove is preferably provided on the surface of the disc type resonator.