The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2010
Filed:
Mar. 14, 2007
Hideki Fujii, Gunma-ken, JP;
Waichi Yamamura, Gunma-ken, JP;
Hideki Fujii, Gunma-ken, JP;
Waichi Yamamura, Gunma-ken, JP;
Shin-Etsu Chemical Co., Ltd, Tokyo, JP;
Abstract
The invention provides an electrostatic chuck in which a workpiece-chucking surface is made flat. An electrostatic chuck with a built-in electric heating means comprises a base plate formed of carbon or a carbon-based composite material and, successively formed on one surface of the base plate, an insulating layer (a), an electroconductive layer (a) to serve as a chucking electrode and an dielectric layer (a) to form a workpiece-chucking surface and, successively formed on the other surface of the base plate, an insulating layer (b) and an electroconductive layer (b) to serve as an electric heater element, the electrostatic chuck improved in that the workpiece-chucking surface of the electrostatic chuck and an opposite surface thereof are warped to have a relationship selected from concavo-convex and convexo-concave, and in that the warping of the surfaces is in a manner such that the workpiece-chucking surface of the dielectric layer is rendered flat when the opposite surface of the electrostatic chuck is fastened to a machine.