The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2010
Filed:
Feb. 09, 2007
Takanori Hyakudomi, Yamanashi, JP;
Takanori Hyakudomi, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
Probesandhaving irregularities formed in leading end portions thereof are brought into contact with an electrode P of a device D, which is a target object to be inspected, at a predetermined probe pressure so that a mechanical damage is applied to an insulating film O on the electrode P. As a result, an electrical resistance value between the electrode P and the probesandis reduced to a first predetermined value or less. Subsequently, a fritting is performed to apply an electrical damage to the insulating film O on the electrode P so that the electrical resistance value between the electrode P and the probesandis set to be a second predetermined value or less which is smaller than the first predetermined value.