The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2010
Filed:
Aug. 24, 2006
Timothy Frederick Compton, Casa Grande, AZ (US);
Junaid Ahmed Siddiqui, Richmond, VA (US);
Ajoy Zutshi, Chandler, AZ (US);
Timothy Frederick Compton, Casa Grande, AZ (US);
Junaid Ahmed Siddiqui, Richmond, VA (US);
Ajoy Zutshi, Chandler, AZ (US);
Air Products and Chemicals, Inc., Allentown, PA (US);
Abstract
A composition and associated method for chemical mechanical planarization (or other polishing) are described. The composition contains a boron surface-modified abrasive, a nitro-substituted sulfonic acid compound, a per-compound oxidizing agent, and water. The composition affords high removal rates for barrier layer materials in metal CMP processes. The composition is particularly useful in conjunction with the associated method for metal CMP applications (e.g., step 2 copper CMP processes).