The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2010
Filed:
Nov. 13, 2006
Applicants:
Fumitoshi Sugimoto, Kawasaki, JP;
Kiyoshi Ozawa, Kawasaki, JP;
Inventors:
Fumitoshi Sugimoto, Kawasaki, JP;
Kiyoshi Ozawa, Kawasaki, JP;
Assignee:
Fujitsu Microelectronics Limited, Yokohama, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/4763 (2006.01);
U.S. Cl.
CPC ...
Abstract
An exposure method executed after processing a hole in a substrate of a semiconductor device, has an exposure step of transferring a pattern on a mask onto an upper layer of the hole and forming a wiring groove by exposure, wherein a quantity of exposure with which a wiring groovejust above the hole or the wiring groove in the vicinity of the hole is exposed to light, is greater than a quantity of exposure with which a wiring grooveA in a position spaced away from just above the hole is exposed to the light.