The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2010
Filed:
Jan. 06, 2006
Akio Itoh, Kawasaki, JP;
Naoya Sashida, Kawasaki, JP;
Akio Itoh, Kawasaki, JP;
Naoya Sashida, Kawasaki, JP;
Fujitsu Microelectronics Limited, Yokohama, JP;
Abstract
To provide a semiconductor device capable of improving accuracy in finishing a hole in which a conductive plug right under a capacitor, and a manufacturing method of such a semiconductor device comprising the following steps: a step of forming first and second conductive plugsin first and second holesin a first insulating film; a step of forming a first openingin an oxidation preventing insulating film; a step of forming an auxiliary conductive plugin the first opening; a step of forming a capacitor Q on the auxiliary conductive plug; a step of forming third and fourth holesin a second insulating filmcovering the capacitor Q; a step of forming the second openingin the oxidation preventing insulating filmunder the fourth hole; a step of forming a third conductive plugin the third hole; and a step of forming a fourth conductive plugin the third hole