The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2010
Filed:
Dec. 22, 2008
Edward Belden Harris, Fogelsville, PA (US);
Sailesh Mansinh Merchant, Macungie, PA (US);
Kurt George Steiner, Fogelsville, PA (US);
Susan Clay Vitkavage, Orlando, FL (US);
Edward Belden Harris, Fogelsville, PA (US);
Sailesh Mansinh Merchant, Macungie, PA (US);
Kurt George Steiner, Fogelsville, PA (US);
Susan Clay Vitkavage, Orlando, FL (US);
Agere Systems Inc., Allentown, PA (US);
Abstract
An inductor formed within an integrated circuit and a method for forming the inductor. The inductor comprises an underlying layer of aluminum formed in a first metallization layer and patterned and etched into the desired shape. In one embodiment the aluminum line comprises a spiral shape. According to a damascene process, a conductive runner, preferably of copper, is formed in a dielectric layer overlying the aluminum line and in electrical contact therewith. The aluminum line and the conductive runner cooperate to form the inductor. In another embodiment the aluminum line and the conductive runner are formed in a vertically spaced-apart orientation, with tungsten plugs or conductive vias formed to provide electrical connection therebetween. A method for forming the inductor comprises forming an aluminum conductive line and forming a conductive runner over the conductive line.