The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2010
Filed:
Jan. 20, 2006
Applicants:
Hiroyuki Tomomatsu, Beppu, JP;
Kazuhiko Watanabe, Hayami-gun, JP;
Tetsuya Tada, Hayami-gun, JP;
Toshiyuki Tani, Hayami-gun, JP;
Inventors:
Hiroyuki Tomomatsu, Beppu, JP;
Kazuhiko Watanabe, Hayami-gun, JP;
Tetsuya Tada, Hayami-gun, JP;
Toshiyuki Tani, Hayami-gun, JP;
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of forming a MEMS structure over active circuitry in a semiconductor body includes forming active circuitry in a semiconductor body, and forming the MEMS structure over the active circuitry, wherein at least a portion of the MEMS structure spatially overlaps the active circuitry.