The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2010
Filed:
Dec. 04, 2006
Sarah Zerbini, Fontanellato, IT;
Angelo Merassi, Vigevano, IT;
Guido Spinola Durante, Gavirate, IT;
Biagio DE Masi, Corsano, IT;
Sarah Zerbini, Fontanellato, IT;
Angelo Merassi, Vigevano, IT;
Guido Spinola Durante, Gavirate, IT;
Biagio De Masi, Corsano, IT;
STMicroelectronics S.r.l., Agrate Brianza, IT;
Nokia Corporation, Espoo, FI;
Abstract
A process for the fabrication of an inertial sensor with failure threshold includes the step of forming, on top of a substrate of a semiconductor wafer, a sample element embedded in a sacrificial region, the sample element configured to break under a preselected strain. The process further includes forming, on top of the sacrificial region, a body connected to the sample element and etching the sacrificial region so as to free the body and the sample element. The process may also include forming, on the substrate, additional sample elements connected to the body.