The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2010
Filed:
Jun. 25, 2007
Isao Matsui, Saitama, JP;
Isao Matsui, Saitama, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
An apparatus for manufacturing fine particles includes a reactor; a first inlet part including at least one port introducing a reactive gas flow containing a fine particle source material; a second inlet part including at least one port introducing a diluting gas flow; a heater exciting the fine particle source material in the reactive gas flow; a first plate including through-holes which substantially equalize a flow rate of the reactive gas flow with respect to a cross section of a flow channel; a second plate including through-holes which substantially equalize a flow rate of the diluting gas flow with respect to a cross section of a flow channel; a gas exhaust port provided in a merging region where the reactive gas flow passed through the first plate and the diluting gas flow passed through the second plate are merged; and a collector which collects fine particles.